Sr. Process Engineer, Lithography, Terafab

What To Expect
We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.

Process engineering is where Terafab technology gets built, atom by atom, and lithography will define the limit of what we can build. You will develop and own patterning processes across three distinct chip families: edge-inference processors, space-hardened chips for orbital satellites, and high-bandwidth memory. With mask production in-house, you'll have unprecedented feedback loops to co-optimize reticle and scanner strategies.

You should have deep expertise in optical lithography, but be ready to work across core process domains such as etch, metrology, and film deposition as integration evolves. This is a highly hands-on role at one of the most ambitious fab programs in the world.

What You'll Do

Develop and qualify EUV and ArFi resist processes, exposure parameters, and coat/develop optimization for critical layers

Qualify scanners (EUV and DUV) from installation through production readiness, including dose-focus matrices, CDU, and overlay

Own in-house mask shop process development (resist, etch, inspection, repair) and co-optimize reticle-scanner strategies using tight feedback loops

Establish overlay and registration control strategies, scanner-to-scanner matching, and APC loop integration

Analyze processes from a first-principles, physics-based approach to understand and manipulate mechanisms, not just recipes

Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement

Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues

Drive next-generation lithography materials and process development

What You'll Bring

Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience

5 years of hands-on lithography process engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment

Deep experience with scanner qualification (ASML or equivalent), resist process development, and process of record (POR) establishment at advanced nodes

Proficiency with lithography metrology tools: CD-SEM, OCD, overlay metrology, defect inspection, and resist profile characterization

Strong DOE skills and statistical analysis capability (JMP, Python, or R)

Ability to work closely and proactively across lithography, etch, thin films, integration, and equipment engineering teams

Benefits
Compensation and Benefits
Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

Medical plans > plan options with $0 payroll deduction

Family-building, fertility, adoption and surrogacy benefits

Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution

Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA

Healthcare and Dependent Care Flexible Spending Accounts (FSA)

401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits

Company paid Basic Life, AD&D

Short-term and long-term disability insurance (90 day waiting period)

Employee Assistance Program

Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays

Back-up childcare and parenting support resources

Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance

Weight Loss and Tobacco Cessation Programs

Tesla Babies program

Commuter benefits

Employee discounts and perks program

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